A laser-based tool for nanotechnology

Nov. 1, 2004
Hillsboro, OR-FEI Company is providing industry, research institutes, and universities with high-technology equipment that can be used to analyze all kinds of materials and to modify micro- and nanostructures.

Hillsboro, OR-FEI Company is providing industry, research institutes, and universities with high-technology equipment that can be used to analyze all kinds of materials and to modify micro- and nanostructures. The company was formed in 1997 by merging FEI (Hillsboro, OR) with the electron microscope business of Philips (Eindhoven, The Netherlands). In 2003 the company opened a factory in the Brno (Czech Republic).

The equipment made by FEI Company provides the technical and scientific community with structural process management solutions for semiconductor technology, data storage technology, material science, and life science. Traditionally the company manufactures a variety of electron microscope, ion beam, and dual-beam (electron beam and ion beam in one unit) systems. A recent company acquisition in Peabody, Mass. (now FEI Inc.) expands FEI’s U.S. position. Now the company can provide its customers with the Vectra™ LMC 9900 system that uses a patented laser micro-chemical technology for fast and efficient modification of microelectronics circuits and nanostructures.

For more information on FEI Company, visit www.feicompany.com.-Martien van Dijk.-MVD

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