Excimer laser annealing system

Jan. 1, 2003
Bois Colombes, France and Tokyo, Japan—An agreement to license its excimer laser annealing system technology to Sumitomo Heavy Industry Ltd. was negotiated by SOPRA last year.

Bois Colombes, France and Tokyo, Japan—An agreement to license its excimer laser annealing system technology to Sumitomo Heavy Industry Ltd. was negotiated by SOPRA last year. In this agreement SOPRA makes available high-pulse-energy excimer laser technology it developed for low-temperature poly-silicon mass (LTPS) production required in the manufacture of thin-film transistors (TFT) for active-matrix liquid crystal displays and organic light-emitting displays.

The SOPRA VEL 1510 is an excimer laser with pulse-to-pulse stability better than 1.5 percent and output up to 23 J at a repetition rate to 10 Hz. This performance enables the same panel production as existing scanning systems but, because of higher laser stability, ensures a higher process yield. Thus the cost of ownership is drastically improved compared to high-repetition-rate laser systems because of a significant reduction in annual maintenance and service.

SOPRA has been developing excimer lasers since 1979 and in the mid-1990s began to specialize in TFT technology. It will continue to serve the market for advanced LTPS and R&D applications. Sumitomo has been supplying laser-annealing systems for several years. The SOPRA technology moves the company to the forefront of the LTPS flat panel display industry.

To learn more about SOPRA contact Marc Stehlé at [email protected].

Sponsored Recommendations

Brain Computer Interface (BCI) electrode manufacturing

Jan. 31, 2025
Learn how an industry-leading Brain Computer Interface Electrode (BCI) manufacturer used precision laser micromachining to produce high-density neural microelectrode arrays.

Electro-Optic Sensor and System Performance Verification with Motion Systems

Jan. 31, 2025
To learn how to use motion control equipment for electro-optic sensor testing, click here to read our whitepaper!

How nanopositioning helped achieve fusion ignition

Jan. 31, 2025
In December 2022, the Lawrence Livermore National Laboratory's National Ignition Facility (NIF) achieved fusion ignition. Learn how Aerotech nanopositioning contributed to this...

Nanometer Scale Industrial Automation for Optical Device Manufacturing

Jan. 31, 2025
In optical device manufacturing, choosing automation technologies at the R&D level that are also suitable for production environments is critical to bringing new devices to market...

Voice your opinion!

To join the conversation, and become an exclusive member of Laser Focus World, create an account today!