Bio & Life Sciences
Science & Research
Group Manager, EUV Technology at the Chair for Technology of Optical Systems, RWTH Aachen University
is Chair for Technology of Optical Systems at RWTH Aachen University (Aachen, Germany).
Industrial Laser Solutions
Making nanostructures with a small EUV system
Feb. 24, 2021
Periodic structures down to 28 nm can be produced using a compact EUV source and relatively simple process technology.
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