Robert Leitel

Group Leader, Advanced Micro-optical Components

[email protected]https://www.microoptics.org

Dr. Robert Leitel is Group Leader for Advanced Micro-optical Components at the Fraunhofer Institute for Applied Optics and Precision (Fraunhofer IOF; Jena, Germany).

FIGURE 1. The new grayscale lithography system is developed for industrial workflows.

Optics

Grayscale lithography system enables high-volume production of freeform micro-optics

Andreas Thoss

Sept. 22, 2021

A UV LED-based photolithography system combines grayscale technology with a digital reticle and stepper to produce freeform micro-optics on a 300 mm wafer, while enabling processing...