UV symposium focuses on 157 nm

Nov. 15, 1999
The Second International UV Laser Symposium, held Oct. 13-14, 1999, by Lambda Physik (Fort Lauderdale, FL), attracted 90 attendees and concentrated on applications of the 157-nm-emitting fluorine excimer laser.

The Second International UV Laser Symposium, held Oct. 13-14, 1999, by Lambda Physik (Fort Lauderdale, FL), attracted 90 attendees and concentrated on applications of the 157-nm-emitting fluorine excimer laser. Attending industry experts included lithography researcher Mordechai Rothschild (Massachusetts Institute of Technology; Cambridge, MA) and Rich Harbison (Sematech; Austin, TX). About one-third of the talks were related to optical lithography, with the remainder divided between materials-processing and scientific applications, according to Mike Scaggs, director of customer support at Lambda Physik. The highlight of the symposium, says Scaggs, was that "157-nm technology has advanced so much in a year."

About the Author

John Wallace | Senior Technical Editor (1998-2022)

John Wallace was with Laser Focus World for nearly 25 years, retiring in late June 2022. He obtained a bachelor's degree in mechanical engineering and physics at Rutgers University and a master's in optical engineering at the University of Rochester. Before becoming an editor, John worked as an engineer at RCA, Exxon, Eastman Kodak, and GCA Corporation.

Sponsored Recommendations

Hexapod 6-DOF Active Optical Alignment Micro-Robots - Enablers for Advanced Camera Manufacturing

Dec. 18, 2024
Optics and camera manufacturing benefits from the flexibility of 6-Axis hexapod active optical alignment robots and advanced motion control software

Laser Assisted Wafer Slicing with 3DOF Motion Stages

Dec. 18, 2024
Granite-based high-performance 3-DOF air bearing nanopositioning stages provide ultra-high accuracy and reliability in semiconductor & laser processing applications.

Free Space Optical Communication

Dec. 18, 2024
Fast Steering Mirrors (FSM) provide fine steering precision to support the Future of Laser Based Communication with LEO Satellites

White Paper: Improving Photonic Alignment

Dec. 18, 2024
Discover how PI's FMPA Photonic Alignment Technology revolutionized the photonics industry, enabling faster and more economical testing at the wafer level. By reducing alignment...

Voice your opinion!

To join the conversation, and become an exclusive member of Laser Focus World, create an account today!