UV symposium focuses on 157 nm

The Second International UV Laser Symposium, held Oct. 13-14, 1999, by Lambda Physik (Fort Lauderdale, FL), attracted 90 attendees and concentrated on applications of the 157-nm-emitting fluorine excimer laser.
Nov. 15, 1999

The Second International UV Laser Symposium, held Oct. 13-14, 1999, by Lambda Physik (Fort Lauderdale, FL), attracted 90 attendees and concentrated on applications of the 157-nm-emitting fluorine excimer laser. Attending industry experts included lithography researcher Mordechai Rothschild (Massachusetts Institute of Technology; Cambridge, MA) and Rich Harbison (Sematech; Austin, TX). About one-third of the talks were related to optical lithography, with the remainder divided between materials-processing and scientific applications, according to Mike Scaggs, director of customer support at Lambda Physik. The highlight of the symposium, says Scaggs, was that "157-nm technology has advanced so much in a year."

About the Author

John Wallace

Senior Technical Editor (1998-2022)

John Wallace was with Laser Focus World for nearly 25 years, retiring in late June 2022. He obtained a bachelor's degree in mechanical engineering and physics at Rutgers University and a master's in optical engineering at the University of Rochester. Before becoming an editor, John worked as an engineer at RCA, Exxon, Eastman Kodak, and GCA Corporation.

Sign up for our eNewsletters
Get the latest news and updates

Voice Your Opinion!

To join the conversation, and become an exclusive member of Laser Focus World, create an account today!