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    Excimer exposure analyzer

    Nov. 29, 1999
    The model 375 248-nm excimer-laser exposure analyzer has a special probe for ASML laser steppers and is traceable to NIST standards...

    The model 375 248-nm excimer-laser exposure analyzer has a special probe for ASML laser steppers and is traceable to NIST standards. The system combines irradiance calibrating technology with a temperature-compensating Smart Probe to give better than ±1% probe-to-probe matching. It handles multiple probes for production requirements.
    OAI, Milpitas, CA

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