L3 LIMO Line Lasers are based on process-optimized beam shapes and allow the selection of an optimum process window for scaling the system to the industrial production level. With a variety of processing heads, the devices can be used for any type of material. They can also be used for annealing, crystallization, and tempering of thin films with high-speed linear scanning processes and for rapid thermal inspection and quality assurance.
LIMO
Dortmund, Germany
www.limo.de
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PRESS RELEASE
L³ LIMO Line Lasers reduce costs of enhanced coatings
The L³ LIMO Line Lasers technology enables development of customized production processes. The line lasers are based on process optimized beam shapes and allow the selection of optimum process window for scaling the system to the industrial production level with most efficient operation and shortest return on investment time. Due to a variety of processing heads the devices can be used for any types of materials.
In addition to process development, these laser sources are also designed for improvement of new thin films (e.g. solar cells, semiconductor devices) and other applications with strongest demand for high energy efficiency. The line lasers are optimized for annealing, crystallization and tempering of thin films with high speed linear scanning processes. Furthermore, the lasers can also be used for rapid thermal inspection and quality assurance.
The L³ LIMO Line Lasers based process development tools are equipped with, e.g., 450 W to 950 W laser sources that run in a cw or pulsed mode with a power density of up to several 100 kW/cm² and a typical line length of 10 mm to 30 mm. In combination with 3 linear stages the beam moves across the target with up to 1 m/s velocity. To transfer the process into production systems the laser sources can be scaled up to several meters line length for optimized productivity and profit.
For further information, please contact Dirk Hauschild, [email protected] or visit www.limo.de.