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    Laser autocollimator

    Feb. 28, 2000
    A ThetaScan TL40 dual-axis laser autocollimator, which can emit a beam smaller than the aperture of the objective lens...

    A ThetaScan TL40 dual-axis laser autocollimator, which can emit a beam smaller than the aperture of the objective lens, can measure and align surfaces as small as 1 mm2 to 0.1 arc sec, including surfaces with nonmirror reflectivity such as polished metal, silicon wafers, and coated glass. Features include a maximum working distance of 1 m and maximum measurement range of 3600 arc sec in each axis.
    Micro-Radian Instruments, San Marcos, CA

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