Laser autocollimator
A ThetaScan TL40 dual-axis laser autocollimator, which can emit a beam smaller than the aperture of the objective lens, can measure and align surfaces as small as 1 mm2 to 0.1 arc sec, including surfaces with nonmirror reflectivity such as polished metal, silicon wafers, and coated glass. Features include a maximum working distance of 1 m and maximum measurement range of 3600 arc sec in each axis.
Micro-Radian Instruments, San Marcos, CA