PI’s (Auburn, MA) P-563.3CD PIMars stage is a piezo flexure-guided scanning/nanomanipulation system that enables precision motion control with resolution in the sub-nanometer realm and 340 × 340 × 340 µm travel in XYZ. Integrated, direct-measuring capacitance sensors and digital closed-loop control boost linearity by up to three orders of magnitude over conventional piezo stages.
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March 31, 2025
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March 31, 2025
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