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    Piezo scanning/nanomanipulation system offers sub-nanometer resolution

    May 24, 2010
    PI’s P-563.3CD PIMars stage is a piezo flexure-guided scanning/nanomanipulation system that enables precision motion control with resolution in the sub-nanometer realm and 340 × 340 × 340 µm travel in XYZ.

    PI’s (Auburn, MA) P-563.3CD PIMars stage is a piezo flexure-guided scanning/nanomanipulation system that enables precision motion control with resolution in the sub-nanometer realm and 340 × 340 × 340 µm travel in XYZ. Integrated, direct-measuring capacitance sensors and digital closed-loop control boost linearity by up to three orders of magnitude over conventional piezo stages.

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