Piezo scanning/nanomanipulation system offers sub-nanometer resolution

May 24, 2010
PI’s P-563.3CD PIMars stage is a piezo flexure-guided scanning/nanomanipulation system that enables precision motion control with resolution in the sub-nanometer realm and 340 × 340 × 340 µm travel in XYZ.

PI’s (Auburn, MA) P-563.3CD PIMars stage is a piezo flexure-guided scanning/nanomanipulation system that enables precision motion control with resolution in the sub-nanometer realm and 340 × 340 × 340 µm travel in XYZ. Integrated, direct-measuring capacitance sensors and digital closed-loop control boost linearity by up to three orders of magnitude over conventional piezo stages.

Voice your opinion!

To join the conversation, and become an exclusive member of Laser Focus World, create an account today!