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    • piezosystem jena Inc

    Hopedale, MA 01747

    COMPANY OVERVIEW

    About piezosystem jena Inc

    3

    Contact

    2B Rosenfeld Dr
    Hopedale, MA 01747
    United States
    http://www.piezojena.com
    508-634-6688
    508-634-6868

    More Info on piezosystem jena Inc

    Manufactures piezo-based nanopositioning equipment, high-resolution scanning stages, and piezo actuators for test and measurement, mask alignment, nanometrology, microscopy, nanotechnology, and semiconductor applications.

    Articles

    (Courtesy of Piezosystem Jena USA)
    FIGURE 1. The MICI80-KMI53 microscopy stage from Piezosystem Jena, available in both open- and closed-loop versions, can be used for positioning or scanning with sub-nanometer resolution. The ultrastiff flexure design drives the digital micrometer heads with a resolution of 1 µm, a manual range of motion of 25 mm in the x-y axes, and a piezo-based range of motion of 80 µm. A proprietary frame design links the x-y axes in a single piece of metal for superior orthogonality and flatness. A special coil spring system delivers a constant force throughout the manual travel range of the stage, allowing preload optimization over the entire range of travel for extremely low drifting behavior.
    Positioning, Support & Accessories

    PRODUCT FOCUS: NANOPOSITIONERS: Nanopositioning equipment answers the call from the world of the very small

    Valerie Coffey-Rosich
    Manufacturers have made strides in stages and flexure design to enable fast, accurate, nanometer-scale motion control in high-resolution microscopy and other short-travel applications...

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