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Ulvac Ferroelectric Etcher NE 7800
March 23, 2011
Related To:
Capovani Brothers Inc
4 Chamber System Process capabilities: Ta, FeRAM, RRAM, MRAM Wafer Size Range: Minimum: 150 mm Maximum :200 mm Set Size: 200 mm System installed in October 2007, decommissioned in Feburary 2008.
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