Ulvac Ferroelectric Etcher NE 7800

    March 23, 2011
    Related To:
    4 Chamber System Process capabilities: Ta, FeRAM, RRAM, MRAM Wafer Size Range: Minimum: 150 mm Maximum :200 mm Set Size: 200 mm System installed in October 2007, decommissioned in Feburary 2008.

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