US-Designed and Manufactured XY Stage with Large Aperture, V-783

The V-783 XY linear-motor stage delivers 310 × 310 mm travel in a monolithic design built for semiconductor inspection, photonics alignment, metrology, laser microprocessing, and high-throughput automation — manufactured in the USA.

 

Unlike stacked-axis configurations, the integrated XY structure reduces overall height and increases bearing width, improving stiffness and geometric performance across the full travel range. Motion is driven by a brushless three-phase ironless linear motor, eliminating backlash and drivetrain compliance inherent in screw- or belt-based systems.

 

Key performance specifications:

  • 310 × 310 mm XY travel with 35 mm clear aperture at full stroke
  • 1 nm encoder resolution; incremental Sin/Cos or absolute BiSS-C options
  • ±0.07 µm bidirectional repeatability; ±0.17 µm calibrated positioning accuracy
  • Straightness and flatness down to 0.75 µm
  • Velocity to 1 m/s; acceleration to 10 m/s²
  • 50 kg load capacity

 

The absolute encoder variant delivers immediate position feedback at power-up, removing the homing requirement and improving startup efficiency and machine safety — a practical advantage in automated production environments. Hard-anodized aluminum construction keeps the stage clean-room compatible and mechanically stable.

 

The V-783 is designed for use with PI's A-81x and A-82x series ACS-based EtherCAT controllers, which support multi-axis synchronization, third-party automation integration, and the PILOT algorithm for optimized dynamic response with reduced motor current. XYZ configurations and granite support base options are available for system-level integration.

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