• M3-LS-3.4-15 Linear Smart Stage

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    May 25, 2021
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    Precision piezo stage with embedded controller – longer travel for beam shaping and more. Direct SPI input to the stage – no external board needed! Only 32 x 32 x 11 mm including controller. 15 mm travel, 0.5 micron resolution. XY or XYZ available. 

    M3-LS Linear Smart Stages are direct-drive, high-precision micro stages designed for fast, simple integration into miniature devices and instruments. All drive electronics are integrated right into the stage housing.

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