Precision piezo stage with embedded controller – longer travel for beam shaping and more. Direct SPI input to the stage – no external board needed! Only 32 x 32 x 11 mm including controller. 15 mm travel, 0.5 micron resolution. XY or XYZ available.
M3-LS Linear Smart Stages are direct-drive, high-precision micro stages designed for fast, simple integration into miniature devices and instruments. All drive electronics are integrated right into the stage housing.
