More Info on PVA TePla AG
More Info on PVA TePla AG
Specializes in unique microwave plasma processing systems for silicon, compound semiconductor, MEMS, FPD, and solar cell manufacturing. Front-end applications include photo resist ashing and descum, as well as polymer, SU8, and sacrificial layer removal for MEMS. Pre-assembly solutions include stress relief and back-side passivation.
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