Excimer Cavity Rear Mirrors (XRM)

April 1, 2020
Rear mirrors (intra-cavity) for ArF (193nm), KrF (248nm), or XeCl (308nm) excimer lasers Calcium Fluoride or Magnesium Fluoride substrates

There are 193nm, 248nmm, & 308nm excimer lasers. These wavelengths find applications in micro-lithography, mircro-manfacturing and medical devices. At these wavelengths it is recommended to use Calcium Fluoride or Magnesium Fluoride substrates for intra-cavity transmissive optical elements. Note that Lambda’s high quality excimer laser cavity coatings are designed for Acid/Fluorine resistance.

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