Combines laser- and vision-based technologies to deliver solutions to meet the needs of OEM customers. Precision monochrome, color, and digital frame grabbers . Wafer mapping sensors enable quick, reliable detection
WaferSense ALS2 moves through semiconductor process equipment to take critical 2D level measurements. ALS2 Vertical is a wireless, wafer-like inclinometer for checking and adjusting...
Wireless and wafer-like, WaferSense ATS moves through semiconductor equipment, just as a wafer would, to capture three-dimensional offset data (x, y and z) for accurate calibration...
WaferSense AVS moves through semiconductor process equipment and automation material handling systems to monitor three-axis accelerations and vibrations. Its wireless communication...
WaferSense AGS measures gaps of semiconductor processes such as thin-film deposition, sputtering and etch. This wireless system improves uniformity and increases yield through...
The APS can be moved through semiconductor process equipment and automation material handling systems to monitor airborne particles in the systems. Its wafer-like shape is compatible...
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