ASML Optics

Wilton, CT 06897


About ASML Optics


77 Danbury Rd
Wilton, CT 06897
United States

More Info on ASML Optics

Manufacturer of precision optical components and systems for a broad range of commercial applications. Provides design-to-image services including optical and mechanical design, optical fabrication and caoting, assembly and system qualification.


FIGURE 1. Several objective design forms can be used in IC inspection applications: (from left) all-fused-silica design is ideal for monochromatic applications; all-refractive design with CaF2 positive lenses and fused-silica negative lenses gives moderate bandwidth; a catadioptric design form with off-axis field can extend bandwidth; and an obscured, essentially all-reflective design offers wide bandwidth, with a large monolith that has one refractive and two reflective surfaces.

Optical Imaging: Inspection applications push imaging lenses into the deep

Semiconductor inspection and yield-enhancing tools are pushing design of imaging objectives into the deep-ultraviolet part of the spectrum and high numerical apertures.

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