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UniformityPro is a software utility for coating chamber design and mask design for maximum uniformity and maximum efficiency.

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UniformityPro

Coating chamber design and mask design software for maximum uniformity

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FIGURE 1. An optical coating chamber (a) includes one or more plasma sources (here, two copper-colored structures in lower part of the chamber) with one or more planetaries (five are shown near the top of the chamber) for holding the coating substrates. The masks-often proprietary-are not shown, but would typically be placed up high just below the planetaries. (Courtesy of Denton Vacuum) The chamber geometry (b) is based on a coordinate system with origin in the center of the chamber floor.

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SOFTWARE & COMPUTING: Computer modeling optimizes thin-film coating uniformity

Coating uniformity is vital for high yields in thin-film coating fabrication processes, especially as coating requirements become tighter and as production volumes increase to...

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