Photodiode has high sensitivity to vacuum ultraviolet light

Oct. 14, 2004
Bridgewater, NJ, October 14, 2004--Hamamatsu has introduced the S9089, a silicon (Si) photodiode with a quartz window that gives it improved sensitivity to vacuum ultraviolet (VUV) light compared to conventional Si photodiodes. The S9089 has been designed for argon fluoride (ArF) and krypton fluoride (KrF) excimer laser measurement applications and for general UV light detection.

Bridgewater, NJ, October 14, 2004--Hamamatsu has introduced the S9089, a silicon (Si) photodiode with a quartz window that gives it improved sensitivity to vacuum ultraviolet (VUV) light compared to conventional Si photodiodes. The S9089 has been designed for argon fluoride (ArF) and krypton fluoride (KrF) excimer laser measurement applications and for general UV light detection.

To ensure highly reliable performance, the quartz window is hermetically sealed to the TO-8 metal package of the S9089. The Si photodiode covers the 190 nm to 1,000 nm spectral response range and achieves peak sensitivity of 0.06 A/W at 193 nm. Dark current is typically 0.02 nA and the S9089 has a rise time of 2 ms. The S9089 has an active area of 5.8 x 5.8 (mm). It is 19.45 mm high and is 13.9 mm in diameter. Operating temperature of the Si photodiode is -40 to +100° C.

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