SEM accessory

Jan. 1, 1997
The MiniCL cathodoluminescence imaging system can be used in a scanning electron microscope to locate and characterize impurities, defects, grain boundaries, zonation, and overgrowth in a range of materials. The system includes a miniature photomultiplier tube mounted on a retractable probe inside the chamber. Working in the visible from 180 to 850 nm, the detector is suited to semiconductor and diamond-film applications as well as for geological and material science studies.

SEM accessory

The MiniCL cathodoluminescence imaging system can be used in a scanning electron microscope to locate and characterize impurities, defects, grain boundaries, zonation, and overgrowth in a range of materials. The system includes a miniature photomultiplier tube mounted on a retractable probe inside the chamber. Working in the visible from 180 to 850 nm, the detector is suited to semiconductor and diamond-film applications as well as for geological and material science studies.

Oxford Instruments, Concord, MA

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