UV exposure analyzer

Jan. 1, 1998
An exposure analyzer for the deep-UV is designed to support the Silicon Valley Grou¥Micrascan family of Ste¥and Scan Exposure Systems. The Model 320 consists of an optical probe and meter enclosed in a portable aluminum case. The probe includes a slit and filter tuned to 248 nm and a UV-enhanced IR-suppressed silicon detector. The instrument can display energy and intensity accurate to ۫.5% and linear within 2% over its entire range, as well as display exposure times.

UV exposure analyzer

An exposure analyzer for the deep-UV is designed to support the Silicon Valley Grou¥Micrascan family of Ste¥and Scan Exposure Systems. The Model 320 consists of an optical probe and meter enclosed in a portable aluminum case. The probe includes a slit and filter tuned to 248 nm and a UV-enhanced IR-suppressed silicon detector. The instrument can display energy and intensity accurate to ۫.5% and linear within 2% over its entire range, as well as display exposure times.

Optical Associates, Milpitas, CA

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