Zeiss laser FIB-SEM microscope integrates a femtosecond laser
The Crossbeam Laser family are site-specific focused ion beam scanning electron microscope (FIB-SEM) solutions that accelerate package failure analysis and process optimization for advanced semiconductor packages. It integrates a femtosecond laser for speed, a gallium ion (Ga+) beam, and SEM for nanoscale-resolution imaging with minimal sample damage.
Zeiss
Oberkochen, Germany