ENDOSCOPIC IMAGING: Tiny OCT probe features MEMS mirror

    March 1, 2011
    Researchers at the University of Florida, in conjunction with WiOptix, Inc., have developed a new endoscopic OCT probe featuring a two-axis microelectromechanical systems (MEMS)-based mirror with through-silicon vias (TSVs) for interconnecting.
    Pennwell web 400 190

    Researchers at the University of Florida, in conjunction with WiOptix, Inc. (Gainesville, FL), have developed a new endoscopic OCT probe featuring a two-axis microelectromechanical systems (MEMS)-based mirror with through-silicon vias (TSVs) for interconnecting.1 The TSV interconnection enables an ultracompact probe design of only 2.6 mm in diameter. The MEMS mirror is actuated by an electrothermal effector capable of scanning ±16° at only 3.6 VDC. The researchers have used the miniature probe in a time-domain OCT system to capture two-and three-dimensional OCT images of acute rat brain tissue.

    Pennwell web 400 190
    The underside of the MEMS mirror device (left) shows the electrothermal actuator; the chip is integrated into a probe (right) measuring 2.6 mm in diameter.

    1. L. Liu et al., J. Biomed. Opt. 16, 026006, doi:10.1117/1.3533323 (2011)

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