ENDOSCOPIC IMAGING: Tiny OCT probe features MEMS mirror

Researchers at the University of Florida, in conjunction with WiOptix, Inc., have developed a new endoscopic OCT probe featuring a two-axis microelectromechanical systems (MEMS)-based mirror with through-silicon vias (TSVs) for interconnecting.

March 1, 2011

Researchers at the University of Florida, in conjunction with WiOptix, Inc. (Gainesville, FL), have developed a new endoscopic OCT probe featuring a two-axis microelectromechanical systems (MEMS)-based mirror with through-silicon vias (TSVs) for interconnecting.¹ The TSV interconnection enables an ultracompact probe design of only 2.6 mm in diameter. The MEMS mirror is actuated by an electrothermal effector capable of scanning ±16° at only 3.6 VDC. The researchers have used the miniature probe in a time-domain OCT system to capture two-and three-dimensional OCT images of acute rat brain tissue.

The underside of the MEMS mirror device (left) shows the electrothermal actuator; the chip is integrated into a probe (right) measuring 2.6 mm in diameter.

1. L. Liu et al., J. Biomed. Opt. 16, 026006, doi:10.1117/1.3533323 (2011)

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