MICRO-OPTICS FABRICATION: Plasma etching of micro-optics has its own rules

Long used in the fabrication of microelectronics, plasma etching is also valuable for producing micro-optics; however, the requirements for micro-optics are different and must be adhered to.

Oct 1st, 2009
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Long used in the fabrication of microelectronics, plasma etching is also valuable for producing micro-optics; however, the requirements for micro-optics are different and must be adhered to. Richard D. Jones
www.laserfocusworld.com/articles/369345

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