The Nano-METZ is a compact z-axis piezo nanopositioning system designed for high speed scanning and ultra-low noise characteristics for demanding AFM and metrology applications. The innovative design of the Nano- METZ coupled with our proprietary PicoQ® sensor technology yields a resonant frequency of 14.5kHz and a noise floor of 400 femtometers/√Hz. The result: unparalled speed, response and precision for the most demanding and discerning metrology applications. Related products include the Nano-HS3M, Nano-MET2, Nano-MET3, Nano- MET10 and Nano-MET20 nanopositioning systems.
Features
- Ultra-fast response piezo nanopositioner
- Femtometer noise floor
- High stability
- Closed loop control
- Compact size
- Picometer positioning resolution
Typical Applications
- High speed, high resolution positioning
- Metrology
- AFM
- SPM
Technical Specifications
Range of motion5 μmResolution0.005 nmResonant Frequency14.5 kHzRecommended max. load (horizontal)*0.1 kgRecommended max. load (vertical)*0.1 kgBody MaterialAluminum or TitaniumControllerNano-Drive®* Larger load requirements should be discussed with our engineering staff.
Position Noise Spectrum
The Nano-METZ demonstrates less than 400 femtometers/√Hz of position noise. Click below to enlarge and view the data.
Step Response Time
The step response time (rise time) of a Nano-METZ performing a 100nm step with no load is 0.25ms. Click below to enlarge and view the data.
Additional Information
Nano-METZ Drawing
