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ESI delivers UV laser memory-repair system for 90-nm design rules
December 23, 2004, Portland, OR--Electro Scientific Industries Inc. (ESI) has received customer acceptance by a leading memory manufacturer for its 9835 system, the first 300-mm ultraviolet (UV) laser memory-repair tool for memory applications at 90-nm or smaller design rules.
According to the company, ESI's laser-fuse processing systems for redundancy activation have a two-decade track record of helping DRAM, SRAM/ and embedded memory manufacturers cost-effectively achieve heightened yields for their products. Employing ESI's patented UV technology, the Model 9835 is specifically designed to address the new fuse designs and materials, tighter fuse pitches, and other manufacturing challenges associated with the shift to 90-nm and smaller device geometries.
According to ESI, the 9835 is the first UV laser fuse processing tool developed for automated production of 200- and 300-mm wafers.
Thu Dec 23 11:14:00 CST 2004
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