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MKS Instruments, Inc., a manufacturer of components and subsystems for vacuum- and gas-based processes, has announced the On-Line MultiGas 2030 Analyzer for monitoring single emission stacks in fabs for PFC abatement efficiency.

The MultiGas 2030 is an FTIR-based analyzer that is capable of 1 ppb sensitivity for multiple gas species present in effluent streams that contain up to 30% water. It can provide simultaneous analysis and display of more than 30 gases.

The MultiGas 2030 from On-Line Products is a new addition to MKS' family of technology products for process productivity, and is being used extensively in fab emissions stack monitoring to ensure compliance with PFC abatement requirements. With its ability to permanently store calibration spectra for gas species, the MultiGas 2030 removes the need to use costly gas cylinders.

Maintenance engineers and technicians will find the robust, fully automated 2030 easy to operate and sustain. A small volume, corrosion-resistant gas cell enables percent to ppb-level detection of highly toxic gases, without a cell change. The small size of the 2030 makes it ideal for transporting from one site to another.

For more details, visit www.mksinst.com/onlineHOME.html.

Fri Nov 30 08:33:00 CST 2001

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