Veeco Metrology Group (Santa Barbara, CA) has introduced a Wyko optical metrology module (OMM) for in-situ metrology in high-volume production environments for OEM applications. The OMM provides accurate process control metrology where it is needed most on the production floor. Features include high-speed, noncontact topography measurements for feature heights from 0.1 nm up to 2mm and for fields of view up to 8 mm square on advanced surfaces.

The new module utilizes the field-proven interferometry techniques that power Wyko optical profilers and is a stand-alone module designed to easily integrate into production equipment. When integrated, the gauge-capable OMM provides closed-loop feedback, minimizes part handling, and meets critical measurement requirements for a wide range of applications, such as fiber optics, optical filters, and more. The OMM supports both phase-shifting and white light interferometry.

The OMM interface – featuring self-contained tip/tilt, illumination, auto-focus, and motorized turret – mates easily with new and existing machinery and handling equipment. Ethernet-based architecture allows access from a remote computer, and customizable recipes enable complete control of automated measurement runs.

For more information, visit www.veeco.com.

Thu Sep 06 09:57:00 CDT 2001