Intellidrives rotary table handles 300 mm semiconductor wafers
The ACR-335UT direct drive rotary table adapts linear motor technology, coupled with precision bearings, to provide accurate handling of 300 mm semiconductor wafers. The 335-mm-diameter center opening accommodates the wafers, allowing for extraction of the chip dies from the wafer manufacturing processes or dual-side wafer inspection. It rotates 360° at up to 300 rpm.
Intellidrives
Philadelphia, PA