Optical profiler from Zygo includes motorized, programmable XY stage

Jan. 18, 2013
The ZeGage optical profiler is now available with programmable stage capabilities.

The ZeGage optical profiler is now available with programmable stage capabilities. With a motorized, programmable XY stage, the profiler stitches adjacent measurements into contiguous, high-resolution 3D plots. Designed for production metrology, it integrates SureScan technology to provide measurements with a precision below 3.5 nm, even in vibration-prone environments.
Zygo
Middlefield, CT

[email protected]

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PRESS RELEASE

ZeGage™ Optical Profiler

Providing nanometer-level surface measurement precision on the production floor, ZeGage™ optical profiler is now available with programmable stage capabilities. With a motorized, programmable XY stage, ZeGage profiler stitches adjacent measurements into contiguous, high-resolution 3D plots; another benefit of an automated stage is the ability to either sample sets of parts, or sample different locations on the same part. Made for production metrology, ZeGage profiler features SureScan™ technology, providing reliable measurements even in vibration-prone environments. ZeGage profiler provides 3D optical surface metrology, with a precision below 3.5 nanometers. To contact your local Zygo representative, call 1-800-ZYGONOW, write [email protected], or visit www.zygo.com

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