The FMSxxHA linear stages for surface metrology applications are available in 100, 200, and 300 mm models. Features include all-steel construction, crossed roller bearings with an anti-creep feature to reduce measurement noise and measurement variability, and a steel ball screw for higher throughput. A stepper motor with linear encoder provides on-axis accuracy down to 1 µm and sub-micron bi-directional repeatability.
Newport (MKS Instruments)
Irvine, CA
www.newport.com/FMS
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PRESS RELEASE
Newport Introduces Higher Accuracy, FMS Linear Stages for Metrology
Irvine, CA – Newport Corporation, a worldwide leader in laser and photonic solutions that Make, Manage and Measure Light®, introduces the last installment of high accuracy FMS stages for higher-end metrology applications. Developed specifically to address the needs of surface metrology applications, the FMSxxHA stages are available in 100, 200 and 300 mm models. Similar to the original FMS stages, these HA versions also feature smooth motion, low noise, high straightness and flatness.
With all-steel construction, the FMS Series combines high stiffness and thermal stability for robust, highly precise, and repeatable measurements. The crossed roller bearings in the FMS have an anti-creep feature to provide exceptionally smooth and straight motion, reducing measurement noise and measurement variability. The precision-ground, steel ball screw is designed for high-speed motion, enabling higher throughput. The FMSxxHA is driven by a stepper motor, with a linear encoder that provides exceptional on-axis accuracy down to 1µm and sub-micron bi-directional repeatability.
For added flexibility in gathering metrology data, the FMS Series is compatible with Newport's high-performance 8-axis XPS Universal Controller, an ESP-compatible, integrated controller/driver. Newport's new FMSxxHA product is ideal for surface metrology, surface profilometry and tribology applications. For more information about the new HA version, please visit: www.newport.com/FMS.
About Newport Corporation
Newport Corporation is a leading global supplier of advanced-technology products and systems to customers in the scientific research, microelectronics manufacturing, aerospace and defense/security, life and health sciences and precision industrial manufacturing markets. Newport’s innovative solutions leverage its expertise in high-power semiconductor, solid-state and ultrafast lasers, photonics instrumentation, sub-micron positioning systems, vibration isolation, optical subsystems and precision automation to enhance the capabilities and productivity of its customers’ manufacturing, engineering and research applications. Newport is part of the Standard & Poor’s SmallCap 600 Index and the Russell 2000 Index.
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