The ZVR integrated vertical and rotation stage is designed for semiconductor wafer positioning, metrology, inspection, and repair. It has a compact and rigid design with improved cantilevered load capacity, with lower crosstalk than earlier designs. It has a wide, 3-point base with a stepper-motor-driven, 10 mm Z-stage with integrated stainless steel rotation.
Newport (MKS Instruments)
Irvine, CA
www.newport.com/ZVR
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PRESS RELEASE
Newport’s New, Integrated Vertical and Rotation Stage for Wafer Positioning
Irvine, CA – Newport Corporation, a worldwide leader in laser and photonic solutions that Make, Manage and Measure Light®, announces a specialized Integrated Vertical and Rotation Stage, the ZVR. Ideal for semiconductor wafer positioning, metrology, inspection, and repair, it is also useful in LED production and applications such as 3D scanning, digitizing models, and validation.
Newport’s ZVR features a compact and rigid design with improved cantilevered load capacity. With significantly lower cross-talk than earlier designs, the new stage delivers higher dynamic system performance in a very low-profile footprint. The low mass, along with a high natural frequency, accommodates a variety of rapid step-and-settle positioning applications.
The ZVR vertical platform has a wide, 3-point base with a stepper-motor-driven 10 mm Z-stage. The integrated stainless steel rotation stage features smooth operation utilizing stainless steel ball bearings. It is available in two models, the ZVR-PP with a stepper motor or the ZVR-PC with a servo-driven DC motor. Both rotation stages provide continuous 360-degree rotation for angular travel. An optional linear encoder for the Z-stage or the Z-stage without the rotation stage, are also available.
The highly-stable, three-point bottom interface permits mounting to any XY stage or other platform. A large, clear aperture through the center of the stage simplifies electrical cable and vacuum-chuck cable/hose management. For added convenience, all electrical and vacuum chuck utility connections are found at a single location.
For more information, visit www.newport.com/ZVR.
About Newport Corporation
Newport Corporation is a leading global supplier of advanced-technology products and systems to customers in the scientific research, microelectronics manufacturing, aerospace and defense/security, life and health sciences and precision industrial manufacturing markets. Newport’s innovative solutions leverage its expertise in high-power semiconductor, solid-state and ultrafast lasers, photonics instrumentation, sub-micron positioning systems, vibration isolation, optical subsystems and precision automation to enhance the capabilities and productivity of its customers’ manufacturing, engineering and research applications. Newport is part of the Standard & Poor’s SmallCap 600 Index and the Russell 2000 Index.
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