The UNECS-2000 spectroscopic ellipsometer measures thickness and optical constants of thin films. Its emitter and sensor heads have built-in light source and controller. Equipped with computer control and analysis software, the UNECS-3000A has an automated mapping function that measures 106 points on a 300-mm substrate in 2 min.
ULVAC Technologies
Methuen, MA
[email protected]
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ULVAC Introduces the UNECS-2000, UNECS-3000A
Spectroscopic Ellipsometers
Methuen, Massachusetts - ULVAC Technologies, Inc. (www.ulvac.com), a leading supplier of production systems, instrumentation and vacuum pumps for technology industries, has introduced the UNECS-2000 spectroscopic ellipsometer for the high speed measurement of film thickness and optical constants of thin films and the UNECS-3000A for automated 300 mm substrate measurements.
The compact UNECS-2000 spectroscopic ellipsometer eliminates the need for conventional methods that mechanically or electrically control polarization devices. It takes advantage of the spectrums obtained from the polarization interference occurring between two high-order phase shifters to instantaneously capture the wavelength distribution of the sample's spectroscopic polarization parameters. The emitter and sensor heads are small with built-in light source and controller. It comes with the computer control and analysis software. The motor stage can handle samples up to 200 mm in diameter. Using parallel measurement, the thickness of up to six individual film layers are measurable at the same time.
ULVAC Technologies has also recently introduced the UNECS-3000A automated high-speed spectroscopic ellipsometer. It combines the ultra-fast measuring capabilities of UNECS-2000 high-speed spectroscopic ellipsometer with an automated mapping function that can handle 300 mm substrates. The UNECS-3000A takes just 120 seconds to measure 106 points on a φ300 mm wafer, less than one fifth time for conventional measuring instruments. It can be used for evaluating resist film thickness for semiconductor lithography and organic EL display film, and in a wide range of applications including on production lines and in research and development.
Ellipsometry Background
Ellipsometers measure the film thicknesses and refractive indexes of transparent or semi-transparent thin films with excellent precision, without coming into contact with them. These measuring instruments are used in many industries including the semiconductor and liquid crystal display industries. Ellipsometers are broadly classified into the single wavelength type, whose light sources are lasers, and the spectroscopic type, which uses halogen, xenon, or other lamps. Spectroscopic ellipsometers can analyze multi-layer films or other complexly structured thin films because they can measure the polarized light condition of thin films in certain wavelength bands. There are two categories of measurement methods: the optical device rotation method and the phase modulation method. The former method controls the polarization properties by mechanically rotating optical devices. The latter method controls the polarization properties of the polarization device electrically. These methods require either mechanical or electrical control of complex optical systems. This is why developing more compact and faster ellipsometers has been difficult.
About ULVAC Technologies, Inc.
ULVAC Technologies, Inc. is a leading supplier of production systems, instrumentation, vacuum pumps and components for the semiconductor, solar, flat panel display, research, automotive, medical, electrical, and refrigeration industries. ULVAC Technologies uses a class-10 process development laboratory and customer demonstration facility to meet the unique needs of their different markets. ULVAC Technologies is a subsidiary of ULVAC, Inc., which is made up of 39 companies engaged in most sectors of the vacuum industry.
For more information, contact Chris Goebel at ULVAC Technologies, Inc., 401 Griffin Brook Drive, Methuen, MA 01844; phone: 978-686-7550, fax: 978-689-6300; www.ulvac.com; email: [email protected]
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