The NanoX stages have one or two axes that provide sub-nanometer accuracy, based on two piezoceramics that are electrically driven in opposite directions. They offer stiffness up to 1.1 N/µm for a movement of 240 µm, with high dynamics up to 700 Hz. They include an inside aperture for lightbeam guidance and integrated temperature compensation.
Piezosystem Jena
Jena, Germany
www.piezosystem.com