Optical beamscanner reduces laser wobble

Optical scanners intended to modulate or deflect light are often galvanometer-based mechanical systems. At high materials-processing speeds, demands on the bearings for moving parts are exceptionally high, and cross-axes wobble (the vertical deviation of a scanned laser beam from its nominal linear axis) is typically on the order of 200 μrad. But a new silicon-based resonant microelectromechanical systems (MEMS) scanner from the Fraunhofer Institute for Photonic Microsystems (IPMS; Dresden, Germany) has demonstrated cross-axes wobble less than 35 μrad; the scanner oscillates at 23 kHz with a mechanical amplitude of ±9°.

Click to Enlarge

A typical Fraunhofer MEMS scanner chip (4.0 × 2.6 mm2) deflects a beam using an aluminum-coated (reflectivity greater than 86% between 450 to 650 nm), 1.2-mm-diameter, circular silicon MEMS mirror. With average power consumption lower than 300 µW, the scanner operates at laser powers up to 600 mW at 670 nm. Unlike galvanometer-based scanners, the design uses photolithographic methods to enable high symmetry and reduce unbalanced masses. And, compared to other MEMS designs, the actuation—based on interdigitated-comb structures—creates a very energy-efficient driving mechanism and minimizes process-related accidental asymmetry. More than 150 MEMS scanner designs can be accessed online using the Fraunhofer IPMS Scanner-Configurator. The customer simply inputs the desired scan frequency, maximum mechanical amplitude, mirror diameter, and maximum mechanical deformation that can be tolerated.

Contact André Dreyhaupt at andre.dreyhaupt@ipms.fraunhofer.de.

More Laser Focus World Current Issue Articles
More Laser Focus World Archives Issue Articles

Most Popular Articles

Webcasts

Ray Optics Simulations with COMSOL Multiphysics

The Ray Optics Module can be used to simulate electromagnetic wave propagation when the wavelength is much smaller than the smallest geometric entity in the ...
White Papers

All About Aspheric Lenses

The most notable benefit of aspheric lenses is their ability to correct for spherical aberration....

Wavelength stabilized multi-kW diode laser systems

Wavelength stabilization of high-power diode laser systems is an important means to increase the ...

Accurate LED Source Modeling Using TracePro

Modern optical modeling programs allow product design engineers to create, analyze, and optimize ...
Technical Digests

OPTICAL COATINGS: Evolving technology produces new benefits

The antireflection, high-reflection, and/or spectral characteristics provided by optical coatings...

REMOTE FIBER-OPTIC SENSING: Data in abundance from difficult environments

The use of optical fibers to measure strain, temperature, and other parameters at desired points ...

SCANNERS FOR MATERIALS PROCESSING: Serving demanding applications

Galvanometer-based scanners are an essential component in laser-based materials-processing system...

Click here to have your products listed in the Laser Focus World Buyers Guide.

PRESS RELEASES

Synopsys' CODE V Version 10.4 is now generally available

03/30/2012 Synopsys' CODE V Enhances Analysis of Precision Optical Systems.

Scratch-resistant mirror with gold surface

03/12/2012 In the LINOS catalog from Qioptiq you will now find the scratch-resistant mirror with gold surface.
Social Activity
  •  
  •  
  •  
  •  
  •  
Copyright © 2007-2014. PennWell Corporation, Tulsa, OK. All Rights Reserved.PRIVACY POLICY | TERMS AND CONDITIONS