Thermo x-ray detector options provide thin film analysis

May 19, 2005, Madison, WI--Thermo Electron is offering new X-ray detector options for its MicroXRT line of microbeam X-ray fluorescence metrology systems, enabling a unique level of analysis for thin film applications in the semiconductor and microelectronics industries.

Microbeam XRF combines a technique known for non-destructive, multi-element measurements, Energy Dispersive X-ray Fluorescence (EDXRF) spectroscopy,
with focusing optics to create a tool designed specifically for thin metallic film metrology. Used to characterize wafers, leadframes, solder bumps, ball-grid arrays and many other multi-layer metal film stacks found in the integrated circuit fabrication, as well as magnetic read/write heads, disk media and suspension assemblies in the data storage industry, Microbeam XRF is presently finding new applications in several more industries involved in metallizations, depositions, and metallic coatings such as sensors and detectors, MEMS devices and opto-telecommunication equipment.

Recently Thermo announced the release of new and redesigned solid-state X-ray detectors, expanding the capabilities of this versatile metrology tool. All detectors eliminate the need for liquid nitrogen cooling typically associated with solid state X-ray detection, enabling maintenance-free, quick start-up and shut-down operations.

Thermo's solid state silicon-lithium or Si(Li) detector provides high resolution and a high degree of sensitivity for very thin film applications. Si(Li) detectors also extend the energy range for measurements of heavier elements (up to 29 keV). With a 10 mm active detector area, Si(Li) detectors enable tighter geometries and large solid angles resulting in improved detection limits of trace materials.

A relatively new, but proven technology in X-ray detection, Thermo's solid state silicon drift detectors are ideal for high count-rate/high throughput applications. This provides shorter measurement times, ten times better count rate statistics, and better precision.

For measurements that require ultimate resolution and sensitivity, Thermo provides a patented Vacuum ConduitT option for Microbeam XRF. This method eliminates the time-consuming process of evacuating the sample chamber for each sample. It exerts vacuum conditions on the X-ray beam generation and detection paths, leaving the sample environment in atmosphere.

Most Popular Articles

Webcasts

Opportunities in the Mid-IR

The technology for exploiting the mid-IR is developing rapidly:  it includes quantum-cascade lasers and other sources, spectroscopic instruments of many...

Fiber Optic Sensors – Fundamentals, Principles and Applications

In this webcast, sponsored by Nufern, we focus on optical fiber sensing technology.  Fundamental concepts will be presented first, followed by the under...

Infinite Possibilities – Easily Combining Scanner and Servo Motion

High precision motion control applications such as laser micromachining, 2-photon polymerization, glass panel and film patterning, and additive manufacturing...

Solutions in Search of Problems: What Spectroscopy Can Do for You

Spectroscopy is so pervasive that most of us take it for granted. We use it for routine laboratory and test measurements without appreciating how those same ...

Technical Digests

HIGH-ENERGY LASER COATINGS: Eliminating laser damage proactively

High-power and high-energy thin-film antireflection coatings for laser optics require careful des...
Sponsored by

LIBS -- spectroscopy for remote identification of materials

Laser-induced-breakdown spectroscopy (LIBS) uses a pulsed laser to vaporize a small sample of a s...
Sponsored by

Laser Tools for Materials Processing

Laser materials processing requires not only the appropriate industrial laser system, but also a ...
Sponsored by

Click here to have your products listed in the Laser Focus World Buyers Guide.

RELATED PRODUCTS

Phantom v1610

Phantom v1610 high-speed digital camera can shoot 1 million FPS.

Phantom v711

Phantom v711 high-speed digital camera

Evolve 128 EMCCD Camera

Quantitative high performance with extreme sensitivity for low-light applications.

RELATED COMPANIES

Surface Optics Corp

Designs and manufactures hyperspectral and multispectral imagers operating from the ult...

Optics Balzers AG

Possesses comprehensive know-how in optical thin-film coatings and components, glass pr...

Cremat Inc

Manufactures and supplies charge-sensitive preamplifiers for use in nuclear and x-ray d...

Social Activity

  •  
  •  
  •  
  •  
  •  
Copyright © 2007-2014. PennWell Corporation, Tulsa, OK. All Rights Reserved.PRIVACY POLICY | TERMS AND CONDITIONS